CM-Series External-Mount End Block

CM-Series External Mount End Block

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The CM is our most compact external-mount end block. It can handle targets up to 1000 mm and has a power rating of up to 20 kW DC or 80 kHz MFAC. 

The CM-Series external-mount end block combines high-performance and reliability in a very compact and lightweight design.

CM-Series External Mount End Block

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Features
  • Customizable drive shaft length
  • Ultra compact and flexible form factor
  • Easy access water seal cartridge
  • Simple design, fewer parts, and highly reliable
  • Magnet bar externally adjustable to any angle
  • Patented target water fill/drain feature
  • Fits industrial standard 125mm ID target sizes or smaller, 80mm size
Benefits
  • All utilities are external
  • Utilities remain attached during target cangeover
  • Wider coverage than drop-in end blocks
  • Fits most chamber designs
  • Excellent power capability with no inductive heating impact - no brush dust
  • High packing density; dual cathodes in 220mm space
  • Drive motors 360 degree positioning
  • Simple, in-house maintenance
  • Allows co-sputtering, tight plasma coupling, and limits shield coating

CM-Series External Mount End Block

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Power

Up to 20 kW DC or 80 kHz MFAC

V/A

1500 V / 50 A

Max. Target Length

Up to 1000 mm (supported)

Cantilever capability depends upon target tube length and weight. 

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