SM-Series External-Mount End Block

SM-Series External End Block

Download Datasheet

Our largest external-mount endblock, the SM can handle targets up to 4000 mm (supported) and has a power rating of up to 200 kW DC or 80 kHz MFAC. 

The SM-Series external-mount end block uses the same patented technology as our SC-Series cylindrical cathode to deliver outstanding value, performance and reliability.

SM-Series External End Block

Download Datasheet

Features
  • Customizable drive shaft
  • Compact and flexible form factor
  • Easy access water seal cartridge
  • Patented power-delivery technology
  • Simple design - fewer parts and highly reliable
  • Magnet bar externally adjusts to any angle
  • Patented target water fill/drain feature
Benefits
  • Wider substrate coverage than traditional internal end blocks
  • Fits most chamber designs
  • All utilities are external and remain attached during target changeover
  • High-packing density; dual cathodes in 400mm space
  • Drive motors mount up, down, inward, or outward
  • High-power with no inductive heating impact - no brush dust
  • Simple, in-house design
  • Allows co-sputtering, itghter plasma coupling, and limits shield coating

SM-Series External End Block

Download Datasheet

Power

Up to 200 kW DC or 80 kHz MFAC

V/A

1500 V / 450 A

Max. Target Length

Up to 4000 mm (supported)

Cantilever capability depends upon target tube length and weight. 

Request a Quote Sales Support