e-Cathode™ OEM Lid

e-Cathode™ OEM Lid

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The SCI e-Cathode™ OEM Lid can be purchased as a complete lid system (digital or analog) or scaled-back according to your requirements.

SCI provides OEM equipment builders complete turn-key solutions, ready to interface with their systems. We can provide as much controls integration as desired onboard the e-CathodeTM.

e-Cathode™ OEM Lid

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Features

Digital and Analog:

  • Local and remote control
  • Optional MFC, gas bar, and anode integration
  • Full safety interlocks
  • Customized discrete I/O connector
  • High voltage, quick disconnect included
  • User defined target-to-substrate distance

Digital Only:

  • Integrated PLC and touch panel
  • Real-time monitoring
  • Advanced parameter monitoring
  • Communicates via Ethernet, profibus, DH+ and more

Analog Only:

  • Analog control interface
  • Basic parameter monitoring
Benefits
  • Speeds system design and integration
  • Reduce cabling requirements

e-Cathode™ OEM Lid

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Minimum Chamber Opening Width (mm)

400

330

Maximum Target Length (mm)

4000

2000

Minimum Target Center-to-Center

195

168

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