RAM-Bar™ Magnetics

RAM-Bar™ Magnetics

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With the Sputtering Components Remotely Adjustable Magnet Bar (RAM-BarTM) you can adjust the distance between the magnet pack and the target surface from outside the system and during operation.

RAM-Bar™ Magnetics

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Features
  • Self-contained system that uses fiber optics for control
  • Individual adjustment point resolution of 1/4mm
  • Mode for constant impedance as target erodes
  • 20mm range of magnet bar movement
  • On-board battery will provide continuous operation for a 6-week campaign
  • Compatible with SCI mQRM and QRM magnet bars
  • Conrol multiple magnet bars through the coater PLC or a dedicated computer
Benefits
  • In-situ unformity adjustments eliminates costly system shutdown. No need to remove the magnet bar for adjustments to achieve the necessary uniformity or adapt to changing uniformity during a campaign
  • Very fine tuning for the most demanding uniformity requirements
  • Constant impedance mode can reduce process drift and help to stabilize the deposition rate throughout the lifetime of the target materials
  • Excellent for keeping constant impedance using targets up to 20 mm material thickness
  • Batteries are standard, rechargeable Li-Ion packs that can quickly and easily be swapped out

RAM-Bar™ Magnetics

Download Datasheet

Minimum Backing Tube Length

1m

Maximum Target Diameter

172 mm

Adjuster Pitch

12" / 305 mm

Target Material Utilization

Based on the type of magnet bar used.

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