MM-Series External-Mount End Block

MM-Series External Mount End Block

Download Datasheet

The MM is our mid-size external-mount end block. It can handle targets up to 2500 mm (supported) and has a power rating of up to 100 kW DC or 80 kHz MFAC. 

The MM-Series external-mount end block uses the same patented technology as our MC-Series end block to deliver outstanding value, performance, and reliability in a compact design

MM-Series External Mount End Block

Download Datasheet

Features
  • Customizable drive shaft length
  • Vary compact and flexible form factor
  • Easy access water seal cartridge
  • Patented power-delivery technology
  • Simple design - fewer parts and highly reliable
  • Magnet bar externally adjustable to any angle
  • Patented target water fill/drain feature
Benefits
  • All utilities are external
  • Utilities remain attached during target changeover
  • Wider substrate coverage than traditional internal end blocks
  • Fits most chamber designs
  • High-power with no inductive heating impact - no brush dust
  • High-packing density; dual cahtodes in 350mm space
  • Drive motors mount up, down inward, or outward
  • Simple, in-house maintenance
  • Allows co-sputtering, tighter plasma coupling, and limits shield coating

MM-Series External Mount End Block

Download Datasheet

Power

Up to 100 kW DC or 80 kHz MFAC

V/A

1500 V / 225 A

Max. Target Length

Up to 2500 mm (supported)

Cantilever capability depends upon target tube length and weight. 

Request a Quote Sales Support

‚Äč