Gas Manifolds

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    Binary Gas Manifold (BGMA)

    The Binary Gas Manifold (BGMA) has equal conductance at each outlet for the most even gas flow and the fastest reactive sputtering…

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    Square-tube Gas Manifold (SGMA)

    The square tube gas manifold is an adjustable solution for non-uniform systems.

    Flow uniformity is verified by finite element analysis.

    It has…

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    T-bar Gas Manifold (TGMA)

    The T-bar gas manifold is our most compact model, for use when limited space is a factor.

    Flow uniformity is verified by…

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