SCI announces release of QRM-Bar™ magnetics

SCI is proud to announce the release of our its QRM-Bar™ magnet bar. This new magnet bar has been engineered for depositing high quality TCO and other electrical grade films.

Designed using 3D magnetic modeling software the QRM-Bar™ is capable of utilization rates ≥ 85% of the total target material added to a backing tube. The higher utilization rates are achieved by utilizing our patent pending staggered turnaround design that breaks up the standard wide turnaround into several smaller narrower offset turnarounds.

The magnetic field strength on the surface of a 155-mm OD target is approximately 1000 gauss, which dramatically reduces the plasma impedance compared to traditional magnet bars.  The stronger magnetic field also reduces the amount of voltage drift as the target material wears away, which in turn increases the process stability over the target material lifetime.

The magnet bar consists of four rows of high strength neodymium magnets sealed in water tight durable stainless steel pouches for years of maintenance-free operation. For more information on this product, please contact your SCI representative.