Sputtering Components releases simulation presentation video
Sputtering Components’ Patrick Morse has created a demonstration video describing examples of SCI simulation capabilities using advance finite element analysis. The presentation was first given at SVC TechCon in 2015 and focuses on thermal and heat transfer of targets in relation to water flow and cooling. The video is viewable on the SCI YouTube Channel.
Starting in January 2015, SCI began offering COMSOL’s enhanced modeling tool as a free service for all SCI customers. Since that time, Morse has run more than 50 simulations for various SCI customers.
“Our customers have been able to rely on the results of the modeling that we’ve done for them," Morse said. "As an example, when they are looking for the optimal system configuration such as magnetic tilt, water flow rates, etc. the analysis can help them through their decision-making process.”
The COMSOL Multi-Physics Modeling capabilities include the following:
- 3D thermal and flow modeling for target water cooling
- Mechanical stress analysis
- 2D and 3D sputter flux collection efficiency modeling
- 2D and 3D magnetic modeling
- 3D gas distribution and pressure analysis for vacuum systems
Also available are the Solidworks simulation tool. Solidworks simulation is capable of performing mechanical and structural analysis in order to support and gain a better understanding of product designs, such as outboard end support structures, deflection reduction in lid weldments, and also to consider other safety factors for structures and materials.
For more information regarding the Sputtering Components’ simulation tools, contact us.