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Magnets |
High strength, fully encapsulated; can achieve high deposition rates; the magnets are categorized according to Gaussian level to achieve industry-leading uniformity and target utilization; no aluminum components |
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Roller System |
Durable and precise multi-rollers: allow the magnetbar to be oriented in any direction for sputtering up, sputtering down or sputtering out of angle; long life and easy maintenance |
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Tuning |
Fine thread settings measured with a vernier caliper; allows easy tuning of the magnetic uniformity |
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Installation |
A simple installation procedure with solutions for vertical installation and connecting to end blocks from other manufacturers |
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