Gas Manifolds

Available in three models, SCI gas manifolds are segmented for main gas and additional process gases. They have a robust design and are easily cleaned. Mounting hardware and waste shielding are included.

Model	Maximum Length	Outlet Type	Features
Model Binary (BGMA)	Maximum Length 4000 mm	Outlet Type Non-replaceable, non-adjustable	Features Highest uniformity, (<+/- 1.2%) Fast reactive sputtering response time
Model Square-Tube (SGMA)	Maximum Length 4000 mm	Outlet Type Replaceable, adjustable	Features Adjustable uniformity for non-uniform systems
Model T-Bar (TGMA)	Maximum Length 1500 mm	Outlet Type Non-replaceable, non-adjustable	Features Compact design for use when limited space is a factor